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12.2 Plasma Cleaners

XEI SCIENTIFIC, INC.

1755 E Bayshore Rd, Ste 17, , , , 94063

www.Evactron.com

XEI Scientific, Inc., makes Evactron RF plasma cleaners (de-contaminators) and low-power RF generators. The Evactron de-contaminator is the world leader in RF plasma ashing for carbon contamination removal in electron microscopes and other vacuum chambers. The Evactron D-C uses a unique RF plasma source to make oxygen radicals from air for downstream plasma ashing of the hydrocarbons and carbon deposits found in vacuum chambers. It cleans chambers up to 300 liters quickly and is safe and compliant to CE, RoHS, c NRTL us, and SEMI –S2. We offer ...
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650.369.0133