Leading OEMs came to A&N looking to improve valve cycle life and reduce downtime in today's demanding MOCVD and PVD processes. A&N engineers exceeded their expectations and developed the next generation of vacuum ball valves. A&N ball valves consist of a body, stem, ball, and two end caps machined from corrosive resistant 316L stainless steel. Fluoroelastomers are used to seal the stem and end caps from atmosphere while the PTFE Teflon® seats cold flow around the ball to isolate the process when closed. The valve is opened and closed manually or pneumatically by ¼ turn, quick actuation. During actuation, the PTFE Teflon® seats wipe across the ball. This feature reduces particulate build-up, making this valve robust in particle-rich effluent streams.