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Pfeiffer Vacuum Introduces HiPace 2800 IT Turbopump for Ion Implantation Applications

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Nashua, New Hampshire -- Pfeiffer Vacuum has introduced the HiPace 2800 IT turbopump that is designed for ion implantation applications. The sophisticated rotor design of the turbopump results in an optimized pumping speed for light gases. This ensures exceptional process adaption for ion implantation processes, where hydrogen is the most accumulating gas. With 2,750 I/s pumping speed for hydrogen, the new HiPace 2800 IT is the best turbopump in its class.

The intelligent temperature management system prevents process condensation and deposition inside the pumping system. It allows setting the temperature individually to ideally support the process. The special coating of the rotor ensures robustness against all ion implantation process materials. These HiPace turbopumps have a robust hybrid bearing design with a combination of ceramic ball bearings on the fore-vacuum side and permanently magnetic radial bearings on the high vacuum side. Together with the efficient coating, this forms the basis for the long life cycle and maximum up-time of the pumps.

Pfeiffer Vaccum - Turbopump HiPace 2800 IT

Turbopump HiPace 2800 IT

Profile Pfeiffer Vacuum - North America

Pfeiffer Vacuum North American operations offer marketing, sales, field services, repair, customer training, and applications and support. Sales and support functions are located throughout the U.S. with major customer support centers in Milpitas CA, Austin TX, Hingham MA and Nashua NH.

About Pfeiffer Vacuum (Stock Exchange Symbol PFV, ISIN DE0006916604) is one of the world's leading providers of vacuum solutions. In addition to a full range of hybrid and magnetically levitated turbopumps, the product portfolio comprises backing pumps, measurement and analysis devices, components as well as vacuum chambers and systems. Ever since the invention of the turbopump by Pfeiffer Vacuum, the company has stood for innovative solutions and high-tech products that are used in the markets Analytics, Industry, Research & Development, Coating and Semiconductor. Founded in 1890, Pfeiffer Vacuum is active throughout the world today. The company employs a workforce of some 2,250 people and has more than 20 subsidiaries. For more information please visit www.pfeiffer-vacuum.com.

For further information, contact:

Ed Ho
Product Manager, Turbopumps
Pfeiffer Vacuum, Inc.
24 Trafalgar Square, Nashua, NH 03063
Phone: 408-273-7274 / Fax: 408-263-7826
Email: EHo@pfeiffer-vacuum.com