Company Description

SHI Cryogenics Group, an integral part of the Precision Equipment Division of Sumitomo Heavy Industries, Ltd., is a leading worldwide provider of innovative cryogenic and vacuum solutions to the medical, semiconductor, flat panel, general coating and research industries. With offices in Asia, Europe and the United States, it has been producing quality cryogenic and vacuum equipment for over 50 years. SHI's renowned engineering departments continue to focus on the latest cryogenic and vacuum technologies, including innovative cryopump and cryocooler designs. Sumitomo (SHI) Cryogenics of America, Inc. (“SCAI”) is the North American Division of the SHI Cryogenics Group, focusing on design, manufacturing, sales and service with corporate office in Allentown, PA and additional locations in Illinois, California, New York and Texas.  For additional information, visit www.shicryogenics.com.

Products, Services and Markets

SCAI is recognized for designing and introducing the cryogen-free cryopump in 1975, enabling low-cost, high-volume commercial manufacturing of semiconductor and optical devices. Today, Marathon^® CP cryopump systems are offered in a variety of sizes and configurations. They are designed to handle the diverse and demanding requirements of a broad range of vacuum and deposition technologies, while their pumping performance remains unsurpassed in the industry. The patented pneumatic actuator design allows them to be readily serviced without the need to break vacuum or remove the cryopump from the chamber, affording users maximum production up-time and low cost of ownership.In addition to cryopumps, SHI Cryogenics Group manufactures both 4K and 10K cryocoolers, pulse tubes, shield coolers, and helium compressors for the semiconductor, research, optical coating, and medical industries. As always, SCAI’s customers benefit from performance reliability, leading edge technology, and a global sales and support network.

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