INFICON is a leading developer, manufacturer, and supplier of vacuum instrumentation, critical sensor technologies, and process control software, with an emphasis on process engineering expertise, for the semiconductor and related industries. These analysis, measurement, and control products are vital to original equipment manufacturers (OEMs) and end-users in the complex manufacturing of semiconductors, flat panel displays, magnetic and optical storage media, and precision optics.

INFICON provides gas analysis, gas leak detection, measurement, and vacuum control products that meet the need for manufacturers to achieve greater speed of production and better product quality at reduced cost. INFICON also offers chemical identification systems for fast on-scene analysis, which is crucial for rapid decision-making in the security, emergency response, and environmental markets.

Product Lines

• Deposition Rate Monitors/Controllers
• Endpoint Detectors
• Plasma Arc Detection
• Gas Sampling/Analysis Systems
• Leak Detectors - Halogen
• Leak Detectors - Refrigerant
• Leak Detectors - Helium
• Leak Detectors - Hydrogren
• Leak Detectors - Methane
• Mass Spectrometers
• Chemical Identification Systems
• Optical Spectrometers
• Photoresist Detectors
• Quartz Monitor Crystals
• Residual Gas Analyzers (RGAs)
• RGA Control/Data Systems
• Factory-Wide Fault Detection and Classification Software
• Factory Automation and Control Software
• Sensor Integration Software
• Vacuum Gauges
• Valves, Fittings, Feedthroughs

INFICON analysis, measurement, and control products are vital to original equipment manufacturers (OEMs) and end-users in the complex fabrication of semiconductors and thin film coatings for flat panel displays, solar cells, magnetic and optical storage media, scientific and consumer optics, and architectural glass coatings. They are essential for gas leak detection in air conditioning/ refrigeration/automotive manufacturing. In addition, INFICON provides world-class products to a wide variety of markets, such as automotive, aerospace, industrial vacuum coating, vacuum furnace and metallurgy, analytical instrumentation, packaging, pharma, public utilities, research and development and petrochemical.

Products include advanced sensors and process control software for gas analysis, metrology, and process diagnostics; RF detectors for plasma arc detection and endpoint control; vacuum gauges; leak detectors; vacuum fittings and components. INFICON also offers chemical identification systems for fast on-scene analysis, which is crucial for rapid decision-making in the security, emergency response, and environmental markets

Other Offices

China
852.2520.2880
Fax 852.2865.6883

France
33.1.6013.7695
Fax 33.1.6013.7696

Germany
49.221.56788.100
Fax 49.221.56788.9100

Japan
81.45.471.3328
Fax 81.45.471.3327

Korea
82/31-783-2942
Fax 82/31-783-2945

Liechtenstein
41/423-388-3111
Fax 41/423-388-3700

Singapore
65/6631-0300
Fax 65/6795-3909

Taiwan
886/3-552-5828
Fax 886/3-552-5829

United Kingdom
44/1254-678250
Fax 44/1254-698577

United States
315/434-1100
Fax 315/437-3803

Company Key Products

Integrated Process Monitoring – INFICON Integrated Process Monitoring delivers direct measurement of process conditions for on-time metrology. INFICON Integrated Process Monitors harness the power of in situ sensors measuring actual process conditions to provide equipment, process, and wafer metrology in real-time.

Residual Gas Analyzers - INFICON residual gas analyzers (RGAs) are used as diagnostic tools to aid process engineers in continuously monitoring the manufacturing process for the presence of contaminant gases and for verifying the presence of desired process gases. INFICON RGAs provide accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection in demanding vacuum applications.

Thin Film Deposition Controllers and Monitors – INFICON market-leading thin film deposition controllers and monitors control deposition rate and thickness of the most complex processes with unsurpassed measurement speed and precision.

Quartz Monitor Crystals – INFICON Quartz Monitor Crystals are available in 5 and 6 MHz with silver, gold or stress-reducing alloy electrodes in a variety of convenient packages.

Vacuum Measurement and Control – INFICON vacuum gauges offer superior accuracy and reliability in compact designs. INFICON has combined multiple technologies in a single controller for affordable total pressure measurement and control of vacuum processes. INFICON offers a wide range of vacuum components, including feedthroughs and fittings for a variety of vacuum applications.

Leak Detection –INFICON helium, hydrogen and refrigerant Leak Detectors are optimized to provide quick, accurate results for testing vacuum integrity and for quality control in a variety of industrial applications, including air conditioning, refrigeration, automotive, and semiconductor manufacturing.