Verity Instruments is the world leader in optical endpoint detection. Products include optical instruments and software for endpoint detection, advanced process control, and film thickness measurement. Verity is a privately held Texas corporation, founded in 1978.
• Optical Emission Instruments and Software
• Spectral Reflectometers
Products, Services, and Markets
Verity's optical emission based instruments include spectrometers, monochromators and interference filter based detectors. These products are used for endpoint determination in etch, ion beam etch, spin etch, CVD chamber clean, photoresist strip, chemical mechanical polishing (CMP), and other processes.
Verity’s spectral reflectometers are used for real-time, in situ, or inline film thickness or transition measurement in etch, CVD, CMP, and related applications.
Company Key Products
Spectrometers -- The SD1024G series includes a wide range of instruments to cost effectively satisfy the needs of different processing applications. In addition to endpoint detection, the SD1024G series is also used designed for leak detection, plasma diagnostics, process development, troubleshooting, fault detection, and advanced process control.
Spectral Reflectometer -- The SP2100 provides real-time, in situ, or inline film transition and/or film thickness determination in etch, CVD, and CMP applications. The SP2100 is also capable of multipoint measurement.
Monochromators -- The EP200 series includes high-performance monochromators with integral photomultiplier tube and electronics.
Detectors -- The PD and PM series are compact, low-cost sensors that use interference filters and silicon diode (“PD”) or photomultiplier (“PM”) tube sensors.