XEI Scientific, Inc., makes Evactron RF plasma cleaners (de-contaminators) and low-power RF generators. The Evactron de-contaminator is the world leader in RF plasma ashing for carbon contamination removal in electron microscopes and other vacuum chambers. The Evactron D-C uses a unique RF plasma source to make oxygen radicals from air for downstream plasma ashing of the hydrocarbons and carbon deposits found in vacuum chambers. It cleans chambers up to 300 liters quickly and is safe and compliant to CE, RoHS, c NRTL us, and SEMI –S2. We offer a 5-year limited warranty for free factory repairs done overnight.
• Anti-Contaminators and decontaminators
• RF plasma cleaners
• RF generators
Products, Services, and Markets
Hydrocarbon free vacuum enables many new technologies and improves the performance of others. The Evactron de-contaminator was developed in 1999 to clean electron microscopes for better images. More than 800 systems have been sold for this application alone. Today, there are new vacuum processes that need carbon-free vacuum, such as EUV lithography, electron spectroscopy, and surface analysis.
The Evactron D-C oxidizes carbon compounds with oxygen radicals made from air in a remote RF plasma oxygen radical source (ORS). The oxygen radicals and oxidation products flow from the ORS though the vacuum chamber toward the pump. Removal of carbon from the vacuum prevents deposition of carbon in areas scanned by electron and ion beams or lasers and UV light.
The Evactron D-C ORS comes with a KF-40 flange, and adaptor flanges are available to mate with other chamber ports. ORS is small in size and easily held in one hand for mounting.